Single Mask Lateral Tunneling Accelerometer
نویسندگان
چکیده
A single-mask lateral tunneling accelerometer with integrated tip has been developed and characterized. High aspect ratio single-crystal silicon springs provide high resolution, wide operating bandwidth, and excellent isolation from off-axis stimuli. In this paper, we present the first such device implementing the SCREAM [1] process technology. We focus on the advantages that this technology affords tunneling accelerometers and present a typical high-resolution accelerometer with 20 μg / rt Hz performance at 100 Hz and 5.5 kHz resonant frequency.
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